Дисперсионные элементы зеркального спектрометра на диапазон 7-30 nm

نویسندگان

چکیده

Multilayer interference structures acting as dispersion elements for a mirror spectrometer wavelength range of 7-30 nm have been calculated and synthesized. Three are implemented: the λ=7-12 – multilayer structure Mo/B4C (periods N=60; period thickness d=6.50 nm); λ=11-18 Mo/Be (N=50; d=9.83 nm) λ=17-30 Be/Si/Al (N=40; d=18.2 nm). For entire spectral range, an efficiency more than 10% was obtained at resolution 0.15-1.0 nm.

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ژورنال

عنوان ژورنال: ?????? ??????????? ??????

سال: 2023

ISSN: ['0044-4642', '1726-748X']

DOI: https://doi.org/10.21883/jtf.2023.07.55760.60-23